Title:
PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2015123514
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a processing method capable of preventing defects due to burrs while maintaining productivity, without largely increasing processing cost.SOLUTION: The processing method includes: an attachment step of attaching, to a tip of a rotary spindle (44), a cutting blade (46) for cutting a planned cutting line of a workpiece (11), and a pair of burr removal members (48, 50) provided so as to sandwich the cutting blade, for removing burrs generated on a side of a top face (11a) of the workpiece by cutting the planned cutting line with the cutting blade; and a processing step of, after executing the attachment step, rotating the rotary spindle, making the cutting blade cut into the workpiece, making the pair of burr removal members sandwiching the cutting blade come into contact with the top face of the workpiece, making the cutting blade and the pair of burr removal members scan, and removing burrs generated on the top face side of the workpiece by the pair of burr removal members, while cutting the planned cutting line with the cutting blade.
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Inventors:
KURIMURA SHIGEYA
KIUCHI ITSUTO
KIUCHI ITSUTO
Application Number:
JP2013267663A
Publication Date:
July 06, 2015
Filing Date:
December 25, 2013
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B23D19/02; B23D47/00; B26D1/14; B28D5/02; H01L21/301
Domestic Patent References:
| JP2006339373A | 2006-12-14 | |||
| JPH10125565A | 1998-05-15 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Tomohiro Okamoto
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