PURPOSE: To provide the title control so designed that a raw sample to be processed is put into a vessel, photographed using a camera, and the processing position is then irradiated with processing beams to make the focus of said beams coincidental with the optical focus despite replacement of an object lens and the thickness and/or material of the vessel.
CONSTITUTION: An object lens 6 is focused upon a raw sample in a vessel 1 using a Z-axis moving device 7 and a telescope 12 is moved using a relevant device 21 to set the focus of processing beams on the raw sample side. Then, the device 21 is controlled to move the focus of said beams onto the interfacial side between the vessel 1 and raw sample, and by stopping the vessel 1 at the processing position, the focus of said beams is made to coincide with the optical focus of a microscope 8 irrespective of the type of the object lens and the thickness and/or material of the vessel.
MURAKAMI SEI
NAKANO TAKAMORI
