Title:
PROCESSING SYSTEM AND PROCESSING METHOD
Document Type and Number:
Japanese Patent JP2022032755
Kind Code:
A
Abstract:
To make it possible to adequately perform processing of a cutting tool.SOLUTION: A processing system for a processing object comprises: a holding part which holds the processing object; a cutting part comprising a cutting tool which cuts the processing object held by the holding part, and a movement mechanism which moves the cutting tool with respect to the processing object; a measurement part which measures a thickness of the processing object; and a display part which displays cutting state of the processing object. The display part displays a movement amount of the cutting tool with respect to the processing object, and a difference between a thickness of the processing body before cutting and a thickness of the same after cutting.SELECTED DRAWING: Figure 8
Inventors:
FUKUNAGA NOBUTAKA
YARIMITSU MASAKAZU
YARIMITSU MASAKAZU
Application Number:
JP2020136912A
Publication Date:
February 25, 2022
Filing Date:
August 14, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B24B49/02; B24B7/00; B24B53/02; B24B53/12; H01L21/304
Attorney, Agent or Firm:
Kanemoto Tetsuo
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
Koji Hagiwara
Naoki Ogita
Takashi Saito
Takuya Mine
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