Title:
PROCESSING SYSTEM
Document Type and Number:
Japanese Patent JP2022115799
Kind Code:
A
Abstract:
To provide a processing system having a structure that is able to efficiently process an object.MEANS: A processing system includes: a processing device capable of performing an additional process on a plurality of objects; and a control device that can control the processing device. Based on a result of a first measurement operation for measuring a shape of a first object of the plurality of objects, the control device generates first processing control information for controlling the processing device so as to perform an additional process on the first object. Based on the first processing control information, the processing device performs an additional process on the first object and an additional process on a second object of the plurality of objects, which is different from the first object.SELECTED DRAWING: Figure 6
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Inventors:
UENO KAZUKI
Application Number:
JP2021203308A
Publication Date:
August 09, 2022
Filing Date:
December 15, 2021
Export Citation:
Assignee:
NIKON CORP
International Classes:
B23K26/34; B22F10/25; B22F10/85; B22F12/90; B23K26/03; B23K26/21; B29C64/268; B29C64/393; B33Y10/00; B33Y30/00; B33Y50/02
Attorney, Agent or Firm:
Tatsuo Egami