Title:
製品洗浄方法
Document Type and Number:
Japanese Patent JP6753384
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce adhesiveness of trace metal in super pure water for product cleaning and suppress metal pollution of an object for cleaning.SOLUTION: There is provided a metal pollution prevention agent containing a polymer having an ion exchange group such as a polystyrene sulfonic acid with molecular weight of 100,000 or more. A primer having an ion exchange group absorbs trace metal in super pure water by an ion exchange reaction and can suppress adhesion to a product. There is provided a product cleaning method for cleaning the product by super pure water to which the metal pollution prevention agent is added. Preferably the super pure water to which the metal pollution prevention agent is added is flown to a separation membrane module and the product is cleaned by membrane permeable water.SELECTED DRAWING: Figure 1
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Inventors:
Hiroshi Morita
Toshimasa Kato
Shigeyuki Hoshi
Toshimasa Kato
Shigeyuki Hoshi
Application Number:
JP2017204526A
Publication Date:
September 09, 2020
Filing Date:
October 23, 2017
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
H01L21/304; B01D61/16; B01J39/05; B01J39/20; B01J41/05; B01J41/14; B01J47/018; B01J47/10; B01J49/20; C02F1/42; C02F1/44
Domestic Patent References:
| JP2011082261A | ||||
| JP2007335856A | ||||
| JP2008066658A | ||||
| JP2001047066A | ||||
| JP2013188692A | ||||
| JP2011231163A |
Attorney, Agent or Firm:
Tsuyoshi Shigeno
Takayuki Shigeno
Takayuki Shigeno