Title:
ION BEAM IRRADIATION AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3138292
Kind Code:
B2
Abstract:
PURPOSE: To observe change in a sample during ion beam irradiation by maintaining a stable level of the value difference in acceleration voltage applied to a transport and drawing voltage so as to adjust the value of acceleration voltage and whereby facilitating adjustment of power source voltage following change in the acceleration voltage.
CONSTITUTION: A differential voltage of 10kV is kept between acceleration voltage and drawing voltage, and when acceleration voltage generated by an acceleration power source 21 is set to 0.5kV, output voltage of a drawing power source 22 is xkV. An expression 0.5kV-xkV=10kV is formed, while output voltage of the power source 22 is determined -9.5kV. When the acceleration voltage is to be changed to 0.6kV, the power source 22 is adjusted for the output voltage to be -9.4V. By carrying out this adjustment, adjustment of output voltage of the other sources i.e., an upstream lens power source 23, a right auxiliary deflection power source 24, a left auxiliary deflection power source 25, a magnet power source 26 for analysis, a downstream lens power source 27, electrostatic prism power sources 28, 29 is no more necessary, while appropriate level of ion beam diameter and ion beam direction are maintained.
Inventors:
Tetsuo Tsukamoto
Masahiko Kotoyose
Masahiko Kotoyose
Application Number:
JP18921191A
Publication Date:
February 26, 2001
Filing Date:
July 03, 1991
Export Citation:
Assignee:
Origin Electric Co., Ltd.
International Classes:
C23C14/48; G21K5/04; H01J37/30; H01L21/66; (IPC1-7): H01J37/30; C23C14/48; G21K5/04; H01L21/66
Domestic Patent References:
| JP224946A |
Attorney, Agent or Firm:
Shinichi Kawakubo