PURPOSE: To decrease fluctuations in compsns. by detecting the start of a prescribed synthesis reaction by the output of an optical sensor and controlling the power feed to a heater and the temp. with high accuracy.
CONSTITUTION: A crucible 3 contg. ≥2 volatile elements, such as As and Ga, and a sealant is placed on a revolving shaft 4 arranged in a high-pressure vessel 1 and after the inside of the vessel 1 is filled with N2, etc., the control of the power feed to the heater 2 is started by a controller 7 to feed power to the heater 2 until about ≤15°C/min heating up speed is attained. The inside of the crucible 3 is maintained at about 800°C and the synthesis reaction of the As and the Ga is effected to generate light by the heat generation of the reaction. The light is detected by the optical sensor 9 mounted on a peep window 8 and the power feed to the heater 2 is controlled by the controller 7. A seed crystal 6 is brought into contact with the surface of the raw material melt and while the revolving shaft 4 and the pulling up shaft 7 are relatively rotated, the pulling up shaft 5 is gradually pulled up. The compd. semiconductor crystal by a liquid ; sealed Czochralski method is thus produced.
KANO MANABU
TANAKA TAKANORI
SASAKI YOSHINOBU
