PURPOSE: To obtain a uniform condensing filter without using a mask by forming a light shielding film by vapor deposition on one main surface of a light transmittable glass substrate then etching the film to form many apertures, providing a photosetting light transmittable resin film on the apertures and remaining light shielding film and exposing the same from the other side.
CONSTITUTION: The light shielding material 2 such as chromium oxide is deposited by evaporation on the light transmittable glass substrate 1 and thereafter the many apertures 6 are formed thereto by etching. The photo-reactive light transmittable resin 7 is covered thereon so as to cover the apertures 6 and the remaining material 2. UV rays are then irradiated from the other side of the substrate 1 and the uncured resin 7 in the non-exposed part on the material 2 is dissolved away by using a solvent such as trichloroethylene. A protective film 4 is formed thereto to cover the resin 7 and the material 2. The need for a stage for using a mask is thus eliminated and the condensing filter having the uniform performance, high sensitivity and high resolution for a solid state image pickup element is thus obtd.
MIZUNO HIROYUKI
JPS57173805A | 1982-10-26 | |||
JPS5986001A | 1984-05-18 |