To provide a system for realizing prevention of failure to insert or extract a reference wafer in the manual operation of reference wafer insertion/ extraction, and for realizing automation of each facility.
A system includes production procedures 22, an automatic reference insertion master 30, and an automatic set indicator 100 for indicating a reference pattern 31 of the automatic reference insertion master 30 to a local site. A set target process retrieval section 101 retrieves the target process procedure 22 for the reference pattern 31. A reference process instruction section 102 instructs the actual local working lot to switch to work data for the reference pattern 31 and also performs data control of the lot. An increase/decrease instructing section 103 gives instructions for increasing/decreasing the number of carrier data.
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