PRODUCTION OF DIAMOND THIN FILMS - MATSUSHITA ELECTRIC IND CO LTD

Title:

PRODUCTION OF DIAMOND THIN FILMS

Document Type and Number:

Japanese Patent JPS5310394

Kind Code:

A

Abstract:

PURPOSE: To make it possible to use inexpensive diamond powder and to inexpensively produce a diamond thin film by sputtering a target made of diamond in an inert atmosphere and forming a diamond thin film on a substrate.

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Inventors:

WASA KIYOTAKA
HAYAKAWA SHIGERU

Application Number:

JP8484076A

Publication Date:

January 30, 1978

Filing Date:

July 15, 1976

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD

International Classes:

C01B31/06; C23C14/06; C23C14/34; C30B29/04; (IPC1-7): C01B31/06

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