Title:
PRODUCTION OF EL ELEMENT
Document Type and Number:
Japanese Patent JPS6153194
Kind Code:
A
Abstract:
PURPOSE:To obtain an EL element having uniform film thickness distribution and Mn concentration distribution, by forming a ZnA:Mn thin film on a thin film electrode or an electrical insulating substrate having a thin film electrode by the use of gaseous-phase thermal decomposition. CONSTITUTION:The mixed raw material gas 22 consisting of ZnR2 (R is CH3, or C2H5), AR' (A is S, or Se; R' is R), H2A, X:Mn(CO)m [(X,m) is (C5H5,3),(CH3, C5H4,3),(C2H5,5),(pi-C4H7,4),(pi-C5H9,4)] is introduced into the quartz glass reaction tube 23, excited and decomposed to a certain extent by the heating zone 24 or infrared light rays. It is thermally decomposd in a gaseous phase on a thin film electrode on the susceptor 26 heated by the heater 25 or the electrical insulating substrate 27 having a thin film electrode whose surface covered with an electrical insulating layer, ZnA:Mn thin film is formed, and the waste gas 29 is exhausted through the waste gas treatment device 28. Consequently, ZnA:Mn thin film having <=+ or -5% film thickness distribution and <=+ or -5% Mn concentration can be formed.
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Inventors:
SHIMOBAYASHI TAKASHI
OKAMOTO NORIHISA
ITO NAOYUKI
OKAMOTO NORIHISA
ITO NAOYUKI
Application Number:
JP17279984A
Publication Date:
March 17, 1986
Filing Date:
August 20, 1984
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
C30B25/02; H01L21/20; (IPC1-7): C30B25/02; H01L21/20
Attorney, Agent or Firm:
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