Title:
PRODUCTION OF FERROELECTRIC FILM
Document Type and Number:
Japanese Patent JPH0891841
Kind Code:
A
Abstract:
PURPOSE: To produce a dense ferroelectric film having satisfactory surface smoothness.
CONSTITUTION: An org. soln. contg. an alkoxide of at least one of metallic elements constituting a multiple oxide ferroelectric is mixed with an org. soln. contg. an alkoxide or salt of the other or its hydrate, a prescribed amt. of water is added to the resultant mixture under heating to prepare a precursor soln. and the objective ferroelectric film is formed using this precursor soln.
Inventors:
SATO SAKIKO
KOBA MASAYOSHI
KOBA MASAYOSHI
Application Number:
JP23178694A
Publication Date:
April 09, 1996
Filing Date:
September 27, 1994
Export Citation:
Assignee:
SHARP KK
International Classes:
C04B35/46; B01J19/00; C01G29/00; H01B3/12; (IPC1-7): C01G29/00; B01J19/00; C04B35/46; H01B3/12
Attorney, Agent or Firm:
Shintaro Nogawa