Title:
PRODUCTION OF FINE NEEDLE BY ELECTRON RAY
Document Type and Number:
Japanese Patent JP05115983
Kind Code:
A
Abstract:
PURPOSE: To form the fine needle by depositing the particle of gold by evaporation on an MgO substrate and irradiating the particle with an electron beam.
CONSTITUTION: The MgO substrate 1 is polished to a circular truncated conical shape and the end face of the smaller area of the truncated cone is irradiated with a cluster beam via a shutter 2 to deposit the microparticle by evaporation. The particle is then irradiated with the electron beam through the shutter 2, by which the sharp and fine needle of ≤2 nanometer radius is produced.
Inventors:
Ajiyan, Puritsukeru
Application Number:
JP1991000305307
Publication Date:
May 14, 1993
Filing Date:
October 24, 1991
Export Citation:
Assignee:
NEC CORP
International Classes:
B21G1/04; B23K15/00; G01B7/34; G01Q60/16; G01Q70/16; (IPC1-7): B21G1/04; B23K15/00; G01B7/34
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