Title:
PRODUCTION OF FLUORIDE THIN FILM
Document Type and Number:
Japanese Patent JP3205371
Kind Code:
B2
Abstract:
PURPOSE: To obtain a method for preparation of an optically homogeneous fluoride thin film for an optical fiber or an optical element.
CONSTITUTION: In the title method wherein a specified base material is placed in a vapor phase reactor and a compd. contg. barium is introduced in a vapor phase and the compd. is decomposed in a plasma atmosphere and a fluoride thin film is provided on the base material, or both a compd. contg. barium and if necessary, a reactive gas are introduced and barium fluoride is provided on the base material by decomposing thermally this, as the compd. contg. barium, a barium-β-diketone complex as shown in the following formula (wherein the combination of (R1, R2) in the formula is (CF3, C2F5) (CF3, C3F7), (C2F5, C2F5), (C2F5, C3F7), (C3F7, C3F7) or (C3F7, C4F9)) is used or the 2nd method, a β-diketone complex of a rare earth element is introduced with the barium-β- diketone complex in vapor phase to incorporate the rare earth element in the barium fluoride thin film.
Inventors:
Koji Sato
Shungo Sugawara
Kazuo Fujiura
Shungo Sugawara
Kazuo Fujiura
Application Number:
JP733092A
Publication Date:
September 04, 2001
Filing Date:
January 20, 1992
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
B01J19/08; C01F11/22; C03B19/14; C03B37/018; C07C49/92; C23C16/30; (IPC1-7): B01J19/08; C01F11/22; C07C49/92; C23C16/30
Domestic Patent References:
| JP2275726A | ||||
| JP63104312A |
Attorney, Agent or Firm:
Yoshihiko Izumi (2 outside)