PURPOSE: To enhance thermal shock resistance of functional material having gradient composition by mixing fine particles which are dispersed in a gaseous phase by changing the ratio of constitutional fine particles in the gaseous phase and depositing the mixed fine particles on a base material to form a green compact.

CONSTITUTION: The fine powder of SiC and ZrO2 which is produced by apparatuses A, B is sent under pressure respectively by gaseous Ar to a fine powder mixing tank 2 and sufficiently mixed in a gaseous phase. Furthermore the mixed fine powder is sent under pressure to a deposition tank 1 through a connection pipe 7. A substrate 3 mounted in the deposition tank 1 is a thin body made of SUS 310 and and heated at about 850°C with a heater 4. The mixed fine powder of SiC and ZrO2 is blown on the substrate 3 from a nozzle 5 and deposited thereon as the mixed fine powder of SiC and ZrO2. At this time, both SiC and ZrO2 are fine particles of ≤0.1μ and therefore the mixed fine powder is completely made minute at 850°C.