PURPOSE: To easily obtain a reactive getter material which is sealed into a vacuum vessel and can permanently maintain a vacuum degree by evaporating a metal to constitute the getter material by using an electron beam in a vacuum, thereby depositing the vapor thereof on a plate for vapor deposition.
CONSTITUTION: The metal to constitute the getter material is housed in a crucible 3 in the vacuum vessel 1 and a melt pool is formed by the electron beam. The above-mentioned metal is deposited by evaporation on the plate 4 for vapor deposition, by which the getter material is obtd. This getter material is sealed into the vacuum vessel and is used to permanently maintain the vacuum degree of the vacuum vessel by occluding the gases past the vessel wall.
OI KENJI
WATAKABE SHIRO
