PURPOSE: To easily obtain the arbitrary thickness profile of finish films by subjecting the working pressure distribution in the radial direction of media to feedback control.
CONSTITUTION: A pressurizing head is constituted of a roller section 3 which is wound with plural pieces of hollow rubber rollers 3 having hollow chambers 7 on mandrels 6 and connected with fluid supply holes 8 for supplying fluid to the hollow chambers 7, a holder 9 which holds the rollers 3 and micrometers 4 which micrometrically adjust the inclination of the magnetic disk medium 1 and the rollers 3. The arbitrary working pressures are easily obtd. in the respective radial positions of the medium 1 when the working pressures P1, P2,...Pn in the respective hollow chambers 7 are changed. The working pressure distribution is determined by inputting the thickness profile of the coated film thicknesses and the result of the measurement is fed back to a calculation section in spite of the generation of a fluctuation in the thickness of the coated films so that the adjustment of the working pressures is automatically executed. The fluctuation in the thickness of the coated films is thereby suppressed.
WO/2010/048030 | PATTERNING OF MAGNETIC THIN FILM USING ENERGIZED IONS |
JPWO2008105309 | Resin composition for nanoimprint |
ITO YASUSHI
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