PURPOSE: To easily control the reactivity in the oxidation process, to improve the operability and to improve magnetic characteristics of the obtd. magnetic recording medium by mixing oxygen gas with inert gas and then introducing the mixture gas.
CONSTITUTION: Oxygen gas and argon gas are supplied from the sources 21, 22, respectively, through flow controllers 23, 24 and mixed in a T-shape tube 25. The gas is completely mixed in a static mixer 26 and passed through a cooling zone 27 to be fed to a nozzle exit 12. In the cooling zone 27, the temp. of the mixture gas is controlled by using liquid nitrogen flowing through a helical tube 28. The temp. of the gas is controlled by detecting temperatures at a thermocouple 29 disposed in the downstream of the cooling zone 27 and at P1 and P2 and controlling the temp. of a heater 30.
KITAORI NORIYUKI
WAKABAYASHI SHIGEMI
MIZUNOYA HIROHIDE
SHIGA AKIRA
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