PURPOSE: To obtain good recording/reproducing characteristics even in a low external magnetic field by incorporating a specified amt. of oxygen in a target comprising rare earth metal ad transition metal in the process of sputtering the target to form a rare earth-transition metal thin film.
CONSTITUTION: On a polycarbonate substrate 1, there are formed a first dielectric film 2 comprising Si3N4, RE-TM film 3 comprising a TbFeCo alloy thin film, second dielectric film 4 comprising Si3N4. Al reflecting film 5, and a protective film 6 comprising UV-curing resin. In the process of forming the film 3, oxygen is incorporated by 1000 - 5000 ppm into the target comprising rare earth metal (Tb) and transition metal (FeCo alloy). Thereby, the external magnetic field required for the RE-TM film can be reduced.
| JPS58146043 | PHOTOMAGNETIC RECORDING MEDIUM |
| JPH05298834 | DEFECT INSPECTING METHOD FOR MAGNETO-OPTICAL DISK |
| JPH04349239 | OPTICAL RECORDING MEDIUM AND PRODUCTION THEREOF |
TAKENOUCHI MASAKI
KISHI TAKASHI
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