To provide a method and an apparatus for efficiently producing fine particles in one-digit nano-sizes.

The fine particle production apparatus 1 is characterized by including a container 21 for storing a solution R, an oscillator 22 for applying vibration energy to the solution stored in the container, and either a drying device 2 for drying a liquid atomized by applying the vibration energy by the oscillator or a mixture (mist) M of a liquid and a solid by using superheated stream S or a drying and transporting device for transporting an atomized liquid or mixture of a liquid and a solid while drying the atomized liquid or mixture. The superheated steam may be superheated steam or superheated vapor of a solvent of the solution and the vibration wave may be ultrasonic wave with a frequency of 20 kHz or higher.