Title:
PRODUCTION METHOD OF MOLD
Document Type and Number:
Japanese Patent JP2014044245
Kind Code:
A
Abstract:
To provide a production method of a mold which can give a pattern with high resolution and improve stability of resolution or uniformity of resolution in a large area.
The production method of a mold includes a step of exposing a resist layer containing an incomplete oxide of a transition metal in an atmosphere having a relative humidity of 30% or lower. In the production method of a mold, the incomplete oxide of a transition metal is preferably an incomplete oxide of molybdenum (Mo) and/or tungsten (W).
Inventors:
YAMAGUCHI FUJITO
Application Number:
JP2012185250A
Publication Date:
March 13, 2014
Filing Date:
August 24, 2012
Export Citation:
Assignee:
ASAHI KASEI E MATERIALS CORP
International Classes:
G03F7/20; G03F7/004; G03F7/38; H01L21/027
Domestic Patent References:
| JP2009245505A | 2009-10-22 | |||
| JP2005018063A | 2005-01-20 | |||
| JP2003315988A | 2003-11-06 | |||
| JPH02141755A | 1990-05-31 | |||
| JPH0293539A | 1990-04-04 |
Foreign References:
| US20040170916A1 | 2004-09-02 | |||
| US20050226999A1 | 2005-10-13 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki