PURPOSE: To obtain a superconductor whose superconductive layer is formed at a low temp. by vapor-depositing more than one of a volatile compd. on a surface of a substrate at a specific temp.
CONSTITUTION: A surface of a substrate 4 consisting of strontium titanate, etc., is heated to 500-700°C 4H. Then three kinds of powdery compds. 15, 16 and 17 (expressed by structural formulas I, II and III respectively) consisting of a Y-containing powder, a Ba-containing powder and a Cu-containing powder are placed on a supporting surface 3F. Then argon heated to about 200°C is supplied to the inside of an evaporator 3 through an open port 3A and the powders 15, 16 and 17 are evaporated by this gas and discharged from a vessel 3. Then the gas flow is mixed with an oxygen supplied toward the open port of a tube 3R through a circular space 2R. In this way, the gas is vapor-deposited on the surface 40 of the substrate 4 to form a superconductive layer 11 consisting of an oxide ceramic material having a composition of Y1Ba2Cu3Ox (x is 6.8-6.95. The thickness of the layer 11 is 10-100 μm.
HERUGA HORUTSUSHIYUU
GEORUKU BAARU
FURANTSU SHIYUMADERAA
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