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Patent Searching and Data


Title:
PRODUCTION METHOD FOR SURFACE ACOUSTIC WAVE DEVICE
Document Type and Number:
Japanese Patent JP2002299985
Kind Code:
A
Abstract:

To provide a production method for surface acoustic wave(SAW) device by which an electrode or resist is hardly damaged by heating in an electrode forming process and a piezoelectric substrate is hardly cracked in flip chip bonding, etc., without increasing a production process.

When producing a SAW device in which first and second SAW elements having different electrode thickness are constituted on a piezoelectric substrate 1, an IDT electrode 2 of the first SAW element, electrode pad layers 8a and 9a, electrode pad layers 10a and 11a of the second SAW element and wiring 16 for short-circuiting are simultaneously formed and when forming an IDT electrode 3 of the second SAW element, the electrode pad layers 8a, 9a, 10a and 11a are made into two layers and after electrodes are completely formed, wiring 16 and 17 for short-circuiting are disconnected.


Inventors:
YAMATO HIDEJI
Application Number:
JP2001096914A
Publication Date:
October 11, 2002
Filing Date:
March 29, 2001
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
H03H3/08; H03H3/10; H03H9/145; (IPC1-7): H03H3/08; H03H3/10; H03H9/145
Attorney, Agent or Firm:
Miyazaki Main Tax