Title:
PRODUCTION OF MICROLENS ARRAY
Document Type and Number:
Japanese Patent JPH06138306
Kind Code:
A
Abstract:
PURPOSE: To provide the process for production of the microlens array which easily forms a microlens array having excellent performance, such as heat resistance and solvent resistance, with high accuracy on a solid-state image pickup element.
CONSTITUTION: This process for production of the microlens array consists in forming positive photoresist patterns on the solid-state image pickup element, then making the patterns transparent by full-surface exposing and forming microlenses 3 by heat flow. These lenses are molded by the heat flow and are treated with a silane coupling agent; thereafter, the lenses are cured.
Inventors:
TAKEYAMA NAOMIKI
HISHIRO YOSHIKI
YAMAMOTO SHIGEKI
HISHIRO YOSHIKI
YAMAMOTO SHIGEKI
Application Number:
JP28582992A
Publication Date:
May 20, 1994
Filing Date:
October 23, 1992
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO
International Classes:
G02B3/00; (IPC1-7): G02B3/00
Attorney, Agent or Firm:
Takashi Kuboyama (1 person outside)