PURPOSE: To easily produce the titled microlens array by forming many circular resist patterns on optical glass, etching the glass to obtain columnar protrusions, then removing the resist and again etching the glass to form the protrusion into a spherical shape.
CONSTITUTION: The photoresist 2 is coated on the surface of a glass sheet 3 and a photomask 1 wherein many circular light-shielding parts are arranged is provided thereon. Then UV rays are irradiated, the photomask is removed and the glass is again etched to form many circular protrusions on the glass sheet. The photoresist 2 is removed, etching is again carried out, the angles of the columnar protrusions 5 are rounded off along with the glass sheet to obtain a spherical shape 6. Then the surface is polished with a soft brush, etc., and the planar microlens array wherein many convex lenses are arranged is formed.
OMI SHIGEAKI
NAKAYAMA SHIN
SAKAI HIROYUKI
YONEDA YOSHITAKA
| JPS58185445A | 1983-10-29 | |||
| JPS5992567A | 1984-05-28 | |||
| JPS5795849A | 1982-06-14 |