To efficiently produce the nozzle plate of an ink jet head in a good yield.

A process for forming unevenness 411 to the part other than the alignment region of the surface of a conductive substrate 401, a process for forming a first photosensitive org. film 402 on the substrate, an exposure process (first exposure process) exposing the photosensitive org. film 402 by using a first mask member 403, a process for forming a second photosensitive org. film 405 on the photosensitive org. film 402, a second exposure process for aligning the alignment mark of a second mask member 406 with the alignment mark 404a on the photosensitive org. film 402 formed in the first exposure process to perform exposure by using the mask member 406, a process for developing the photosensitive org. films 402, 405 to form a laminated org. film pattern 408, a process for depositing a metal film 409 on the surface of the substrate 401 along the org. film pattern 408, a process for forming a water repelling film 410 on the metal film 409 and a process for removing the org. film pattern 408 and the substrate 401 are performed in this order.