Title:
PRODUCTION OF OPTICAL DEVICE
Document Type and Number:
Japanese Patent JP3281470
Kind Code:
B2
Abstract:
PURPOSE: To obtain an optical device excellent in adhesive property and maintaining the stability even after use for a long time by forming a coating film of an org. zirconium compd. on the surface of a substrate and further forming a coating film of fluorine-contg. polyimide-based resin.
CONSTITUTION: A coating film of an org. zirconium compd. is formed on the surface of a substrate and a coating film of fluorine-contg. polyimide-based resin is further formed. The org. zirconium compd. is preferably a zirconium ester such as tetrapropyl zirconate or a zirconium chelate compd. such as tetrakis(acetylacetonato)zirconium. The org. zirconium compd. is dissolved in an org. solvent or water and applied on the surface of the substrate to form the coating film. The fluorine-contg. polyimide-based resin is. e.g. fluorine-contg. polyimide resin or fluorine-contg. poly(imide.isoindoloquinazolinedione imide) resin.
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Inventors:
Tomoaki Yamagishi
Nor Sasaki
Nor Sasaki
Application Number:
JP31972793A
Publication Date:
May 13, 2002
Filing Date:
December 20, 1993
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G02B6/13; G02B6/12; H01L33/56; (IPC1-7): G02B6/13; G02B6/12; H01L33/00
Domestic Patent References:
JP4235506A | ||||
JP5599728A | ||||
JP56131949A | ||||
JP5730335A |
Attorney, Agent or Firm:
Minoru Nakamura (10 outside)