To provide a process for manufacturing an optical element with optical multilayered films which obviates the occurrence of film peeling during cutting of an optical substrate with the optical multilayered films or under high-temp. and high-humidity conditions regardless of the various values of the coefft. of thermal expansion of the substrate.

This process for producing the optical element with the optical multilayered films consists in obtaining the plural optical elements with the optical multilayered films of desired shapes by manufacturing the optical substrate with the optical multilayered films formed with the optical multilayered films on the optical substrate, then cutting the optical substrate with the optical multilayered films. The optical multilayered films are formed on the optical substrate by covering the cutting margin parts of the optical substrate which is a magnetic garnet with mask patterns.