Title:
PRODUCTION OF ORGANIC THIN FILM AND PRODUCTION DEVICE THEREFOR
Document Type and Number:
Japanese Patent JPH04178434
Kind Code:
A
Abstract:
PURPOSE:To efficiently promote chemical reaction and to obtain a stable organic thin film in excellent controllability by vaporizing organic molecules in a vacuum chamber, monomolecularly piling the organic molecules on a substrate to form a thin film and then subjecting to combination of light irradiation and impression of high magnetic field. CONSTITUTION:At least one kind of organic molecules as a solid source is fed to cells 5, heated in a vacuum chamber 1 in a vacuum state, vaporized, passed as a molecular beam through shutters 6, the organic molecules having reached a substrate 2 are adsorbed on the substrate 2 to form an orientated monomolecular film. An operation of irradiation with a laser beam from a high-quality photon beam generator 7 to polymerize the organic molecules, to form a polymer and stabilize the molecules and an operation of photo- crosslinking in the monomolecular film by impression of high magnetic field by a high magnetic field generator 4 are simultaneously or successively carried out to give the objective organic thin film.
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Inventors:
KURATA TETSUYUKI
TSUMURA AKIRA
NOBUTOKI EIJI
FUCHIGAMI HIROYUKI
HAMANO KOJI
HIZUKA YUJI
TSUMURA AKIRA
NOBUTOKI EIJI
FUCHIGAMI HIROYUKI
HAMANO KOJI
HIZUKA YUJI
Application Number:
JP30817890A
Publication Date:
June 25, 1992
Filing Date:
November 13, 1990
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G02F1/35; C08J5/18; C09K3/00; C23C14/12; C23C14/22; G02F1/355; G02F1/361; (IPC1-7): C08J5/18; C09K3/00; G02F1/35
Domestic Patent References:
| JPS63228713A | 1988-09-22 |
Attorney, Agent or Firm:
Kaneo Miyata (3 outside)
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