Title:
PRODUCTION OF OXIDE ETCHING PRODUCT AND DEVICE THEREFOR
Document Type and Number:
Japanese Patent JP3456804
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To simply keep the composition of an etching solution for etching an oxide always constant and to remarkably improve the fraction defective of an oxide etching product obtained.
SOLUTION: In this production, the electric conductivity of an etching solution is measured in the etching process. When the measured result is varied from a predetermined conductivity value, the etching solution is replenished with a hydrochloric acid-nitric acid mixed aq. solution having a prescribed composition to adjust the conductivity of the etching solution to the predetermined value and, accordingly, the composition of the etching solution is kept constant. At this time, the measurement of conductivity of the etching solution is performed by placing conductivity measuring electrodes covered with an insulator in a hollow cylindrical container and passing the etching solution through the container.
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Inventors:
Akimasa Yajima
Yoshitsugu Ishizuka
Masatoshi Tanaka
Yoshikatsu Kubota
Yoshitsugu Ishizuka
Masatoshi Tanaka
Yoshikatsu Kubota
Application Number:
JP19539895A
Publication Date:
October 14, 2003
Filing Date:
July 31, 1995
Export Citation:
Assignee:
Asahi Denka Kogyo Co., Ltd.
International Classes:
C23F1/00; C03C15/00; C23F1/08; C23F1/30; G01N27/07; H01L21/306; (IPC1-7): C23F1/00; C03C15/00; G01N27/07; H01L21/306
Domestic Patent References:
| JP63184726A | ||||
| JP63171886A | ||||
| JP6357784A | ||||
| JP614233A | ||||
| JP60114579A | ||||
| JP57140339A | ||||
| JP5234795A | ||||
| JP7176853A | ||||
| JP6138067A | ||||
| JP4249757A | ||||
| JP4242160A | ||||
| JP4158254A | ||||
| JP214061U | ||||
| JP5533018B2 |
Other References:
【文献】特許3406079(JP,B2)
Attorney, Agent or Firm:
Soga Doteru (6 people outside)