Title:
PRODUCTION OF OXIDE SUPERCONDUCTING THIN FILM
Document Type and Number:
Japanese Patent JPH03115198
Kind Code:
A
Abstract:
PURPOSE:To enable high-speed film formation by using a Bi contg. oxide target and regulating the ratio among the constituents of the oxide to control the crystal structure of a formed thin film. CONSTITUTION:Bi2O3 is mixed with SrCO3, CaCO3 and Cu2O so as to render a compsn. represented by the formula (where k>=2 and m<=n+1) and the mixture is calcined in the air to obtain a Bi-contg. oxide target. A thin film of an oxide superconductor is formed on a substrate with the target by an excimer laser aberration method under the conditions of 600-800 deg.C temp. of the substrate and >=10mTorr pressure of atmospheric oxygen and the formed film is heat- treated at 840-900 deg.C in an atmosphere contg. oxygen under 1/10-1atm partial pressure.
Inventors:
OYA SEISHIRO
KARASAWA SHIRO
KURIHARA YUKIO
HIRABAYASHI YASUO
KOBAYASHI MASARU
KARASAWA SHIRO
KURIHARA YUKIO
HIRABAYASHI YASUO
KOBAYASHI MASARU
Application Number:
JP25226889A
Publication Date:
May 16, 1991
Filing Date:
September 29, 1989
Export Citation:
Assignee:
KANAGAWA PREFECTURE
International Classes:
C04B41/87; C01G1/00; C01G29/00; C23C14/34; C30B29/22; H01B12/06; H01B13/00; (IPC1-7): C01G29/00; C04B41/87; C23C14/34; C30B29/22
Domestic Patent References:
| JPH01179474A | 1989-07-17 | |||
| JPS6481280A | 1989-03-27 | |||
| JPS63264819A | 1988-11-01 |
Attorney, Agent or Firm:
Kinichi Kitamura