Title:
PRODUCTION OF OXIDE SUPERCONDUCTING THIN FILM
Document Type and Number:
Japanese Patent JPH03174319
Kind Code:
A
Abstract:
PURPOSE: To improve superconducting characteristics by sputtering a multiple target consisting of a Ba or Ba alloy target and a target of the oxides of metals other than Ba.
CONSTITUTION: A powdery mixture 1 of the oxides of metals other than Ba, e.g. Y2O3 and CuO is spread all over a Cu plate 4 to a prescribed thickness and discoid Ba or Ba alloy pellets 3 are embedded in the erosion region 2 of the spread powder 1 to form a multiple target. An oxide superconducting thin film of an LnBa2Cu3O7-x (Ln is a rare earth element) type oxide is obtd. by sputtering the target with an r.f planar magnetron sputtering device, etc. A target of BaCu-Y2O3, BaCu-Y2O3-CuO, YBa-CuO, YBaCu-Y2O3-CuO, etc., produces a similar effect.
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Inventors:
MUROI MICHITO
OKAMURA YUKO
TSUDA KOICHI
KOE KAZUO
OKAMURA YUKO
TSUDA KOICHI
KOE KAZUO
Application Number:
JP31187089A
Publication Date:
July 29, 1991
Filing Date:
November 30, 1989
Export Citation:
Assignee:
FUJI ELECTRIC CO LTD
International Classes:
C04B41/87; C01G1/00; C01G3/00; C23C14/08; C23C14/34; H01B12/06; H01B13/00; H01L39/24; (IPC1-7): C01G3/00; C04B41/87; C23C14/08; C23C14/34; H01B12/06; H01B13/00; H01L39/24
Attorney, Agent or Firm:
Iwao Yamaguchi
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