PURPOSE: To obtain the subject film having improved quality by keeping a substrate at a prescribed temperature in an atmosphere having a prescribed O2 partial pressure and applying a laser beam to a target containing Bi, Sr, Ca and Cu at specific atomic ratios.
CONSTITUTION: Powder of a sintered material containing Bi, Sr, Ca and Cu at atomic ratios of Bi/Sr/Ca/Cu=2/2/2/3 is formed to obtain a target, which is placed opposite to a substrate consisting of MgO single crystal, etc., in a laser-irradiation apparatus. The laser-irradiation apparatus is evacuated in high vacuum, O2 gas is introduced into the apparatus to an O2 partial pressure of 0.01-1Torr and the surface of the substrate is heated to about 610-670°C. An excimer laser beam is applied to the target surface for a prescribed period to form a film on the substrate and the product is quenched to obtain a Bi2Sr2 Ca2Cu3Ox oxide superconductor thin film having high quality.
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