PURPOSE: To produce an oxide target free from the occurrence of cracking and spitting and having long service life by adding alkali metals, alkaline-earth metals, or salts thereof to oxide powder material, compacting the resulting powder mixture, and then sintering the resulting green compact.

CONSTITUTION: Alkali metals, alkaline-earth metals, or salts thereof are added to a powdery raw material of oxide, such as WO3, and the resulting powder mixture is compacted and sintered. It is desirable to regulate the amount of the above additives to be added to about 10-100ppm. By this method, the melting point of the powdery material of oxide is lowered, and the oxide target in which crystalline form is changed can be obtained. By using the above oxide target, low-powered and short-time electron beam vapor deposition is enabled, and further, the occurrence of cracking and spitting can be reduced and service life can be prolonged.