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Title:
PRODUCTION OF PHOTOMASK
Document Type and Number:
Japanese Patent JPS5828746
Kind Code:
A
Abstract:

PURPOSE: To produce a metallic photomask without having a printing process and to avoid the attachment of foreign matters, etc. during the handling, by deleting a gelatin film after baking the photomask and then deleting a silver educing part after the attachment of a metallic film.

CONSTITUTION: An emulsion photomask containing a pattern part 2 where the silver educed onto a glass substrate 1 and a gelatin film 3 is baked to harden the emulsion layers 2 and 3. Then a part 3' exclusively consisting of the film 3 is removed. A metallic film 4 is attached on the emulsion mask by a sputtering or vapor deposition process, and the part 2''' where the silver is educed is deleted along with the film 4 stuck onto the part 2'''. Thus a metallic photomask is obtained without interposing a printing process, and the attachment of foreign matters can be avoided during the handling or printing. At the same time, the use of a valuable metallic photomask substrate is eliminated.


Inventors:
NISHIGUCHI TAKAO
Application Number:
JP12704681A
Publication Date:
February 19, 1983
Filing Date:
August 13, 1981
Export Citation:
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Assignee:
NIPPON ELECTRIC CO
International Classes:
G03F1/00; G03F1/54; G03F1/68; H01L21/027; (IPC1-7): G03F1/00; H01L21/30
Attorney, Agent or Firm:
Uchihara Shin



 
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