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Patent Searching and Data


Title:
PRODUCTION OF POLYMER BINDER FOR RADIATION-SENSITIVE MIXTURE FOR POSITIVE/NEGATIVE TREATMENT
Document Type and Number:
Japanese Patent JPH1025314
Kind Code:
A
Abstract:

To obtain a polymer binder capable of preparing a highly sensitive radiation-sensitive mixture which is capable of both positive and negative treatments and of alkali development, by reaction of a specific polymer with a dihydropyran or the like.

This polymer binder is obtained by reaction of the hydroxyl group of (A) a phenolic hydroxyl group-bearing polymer with (B) a dihydropyran or (C) an alkyl vinyl ether, or by polymerization or polycondensation of the reaction product from the hydroxyl group of (D) a phenolic hydroxyl group- bearing monomer with the component B or C. It is preferable that 10-100% of the hydroxyl group of the component A is reacted with the component B or C, and the component A is a p-cresol/formaldehyde-predominant novolak, specifically, poly-(p-hydroxystyrene), poly-(p-hydroxy-α-methylstyrene) or p- hydroxystyrene/p-hydroxy-α-methylstyrene copolymer.


Inventors:
SCHWALM REINHOLD
BINDER HORST
Application Number:
JP6081197A
Publication Date:
January 27, 1998
Filing Date:
March 14, 1997
Export Citation:
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Assignee:
BASF AG
International Classes:
C08F8/00; C08F12/22; C08G8/28; C08G8/36; C08K5/372; C08L25/18; C08L61/08; C09D125/18; C09D161/08; G03F7/004; G03F7/038; G03F7/039; G03F7/38; G03F7/023; H01L21/027; (IPC1-7): C08F8/00; C08K5/372; C08L25/18; C08L61/08; C09D125/18; C09D161/08; G03F7/004; G03F7/023; G03F7/038; G03F7/039; G03F7/38; H01L21/027
Attorney, Agent or Firm:
Tajiro Taiji