Title:
PRODUCTION OF POWDER
Document Type and Number:
Japanese Patent JP3835942
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for producing powder capable of producing a powder within a sharp particle size distribution.
SOLUTION: Liquid to be a precursor of a ceramic material is sprayed to form fine liquid drops and then the fine liquid drops are heated. Consequently, a ceramic powder containing secondary particles with 10-180 μm particle diameter and of which 90% or more particles are within a particle distribution range of ±10% of the average particle diameter can be obtained. A liquid spraying apparatus is so manufactured by joining a pump part 21 in which a plurality of liquid pressurizing chambers 15 corresponding to nozzle holes 12 are formed to a nozzle part 11 in which a plurality of the nozzle holes 12 for spraying a liquid are formed as to spray a liquid supplied to the liquid pressurizing chambers 15 through the nozzle holes 12 by generating pressure in the liquid pressurizing chambers 15 by deforming parts of walls of the liquid pressurizing chambers 15 by piezoelectric/electrostrictive elements 22. The nozzle part 11 and the pump part 21 are made of a zirconia ceramic.
Inventors:
Yukihisa Takeuchi
Nobuo Takahashi
Nobuo Takahashi
Application Number:
JP33585898A
Publication Date:
October 18, 2006
Filing Date:
November 26, 1998
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
B01J2/04; B05B7/00; B01J19/00; C01B13/34; H01L41/09; (IPC1-7): B01J2/04; B01J19/00; B05B7/00; C01B13/34; H01L41/09
Domestic Patent References:
| JP4040226A | ||||
| JP6277486A | ||||
| JP6040030A | ||||
| JP7214779A |
Foreign References:
| WO1996033009A1 |
Attorney, Agent or Firm:
Ippei Watanabe