PRODUCTION OF PYROELECTRIC CRYSTAL FILM

Title:

PRODUCTION OF PYROELECTRIC CRYSTAL FILM

Document Type and Number:

Japanese Patent JPH08133736

Kind Code:

A

Abstract:

PURPOSE: To obtain an oriented pyroelectric crystal film having crystallographic axes in a certain direction and not requiring film formation or heat treatment at a high temp. by combining two processes each carried out under specified conditions when a lead titanate zirconate pyroelectric crystal film is formed on a substrate by hydrothermal synthesis.

CONSTITUTION: When a pyroelectric crystal film made of Pb(ZrxTi1-x)O3 where 0≤x≤1) is formed on a substrate by hydrothermal synthesis, the following two processes are adopted. The 1st process in which crystal nuclei are formed under the conditions of 50-500mmol/l Pb-contg. stock compd., 20-500mmol/l Zr-contg. stock compd. and 0.002-7mmol/l Ticontg. stock compd. The 2nd process in which crystals are grown under the conditions of 50-50Ommol/l Pb-contg. stock compd., 10-400mmol/l Zr-contg. stock compd. and 10-500mmol/l Ti-contg. stock compd.

Inventors:

KONO TAKASHI
NAGAO KEIGO
HASHIMOTO KAZUO
KIMURA TAKAYUKI

Application Number:

JP30531494A

Publication Date:

May 28, 1996

Filing Date:

November 04, 1994

Export Citation:

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Assignee:

UBE INDUSTRIES

International Classes:

C01G25/00; C30B7/10; C30B29/22; H01B3/00; H01L37/02; (IPC1-7): C01G25/00; C30B7/10; C30B29/22; H01B3/00; H01L37/02

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