PURPOSE: To obtain an oriented pyroelectric crystal film having crystallographic axes in a certain direction and not requiring film formation or heat treatment at a high temp. by combining two processes each carried out under specified conditions when a PLZT pyroelectric crystal film is formed on a substrate by hydrothermal synthesis.
CONSTITUTION: When a pyroelectric crystal film made of (Pb1-xLax) (Zry- Ti1-y)1-xO3 (where 0≤x<1 and 0≤y≤1) is formed on a substrate by hydrothermal synthesis, the below-cited two processes are adopted. The 1st process in which crystal nuclei are formed under the conditions of 50-500mmol/l Pb-contg. stock compd., 5-100mmol/l La-contg. stock compd., 20-500mmol/l Zr-contg. stock compd. and 0.002-5mmol/l Ti-contg. stock compd. The 2nd process in which crystals are grown under the conditions of 50-500mmol/l Pb-contg. stock compd., 5-100mmol/l La-contg. stock compd., 10-500mmol/l Zr-contg. stock compd. and 5-400mmol/l Ti-contg. stock compd.
NAGAO KEIGO
HASHIMOTO KAZUO
KIMURA TAKAYUKI
