PURPOSE: To provide a stable PZT sol solution capable of long-term preservation and to provide thin ferroelectric film using this solution.
CONSTITUTION: Lead oxide and acetic anhydride are dissolved in a 2- methoxyethanol solution followed by adding to the resultant solution Zr-, Ti-, Sn- and Sb alkoxides and a trivalent or pentavalent metal salt or alkoxide and then carrying out polymerization to make the objective sol solution. Thence, an electrically conductive metal is grown on an oxidized film oriented in a specified direction so as to be parallel with the orientation of the film, and the resulting thin electrically conductive metal film is coated with the above PZT solution followed by drying. The substrate thus coated with this solution is then heated to 500-800°C in a mixed gas of oxygen (or air) and steam to thermally decompose and crystallize the coating film, thereby making the crystallized coating film orient in the same direction as the above-mentioned electrically conductive metal.
RAN MUNEKI
MIYAZAKI SHUNICHI
