To provide a method for producing a ridge type three-dimensional waveguide of a ferroelectric oxide nonlinear crystal which is hardly mechanically and chemically workable.
The method for producing the ridge type three-dimensional waveguide consisting of the ferroelectric oxide nonlinear crystal includes a stage of forming the high-refractive index ferroelectric oxide nonlinear crystal having a refractive index higher than the refractive index of a substrate 1 consisting of the ferroelectric oxide nonlinear crystal on this substrate, a stage for forming a metallic film on the high-refractive index ferroelectric oxide nonlinear crystal, a stage for forming mask 6 by etching this metallic film and a stage for forming the ridge portion consisting of the high-refractive index ferroelectric oxide nonlinear crystal by selectively removing the high-refractive index ferroelectric oxide nonlinear crystal by a dry etching method.
ONOE ATSUSHI
CHIKUMA KIYOBUMI
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