Title:
PRODUCTION OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5362990
Kind Code:
A
Abstract:
PURPOSE:To obtain Al films having fine patterns which are isolated between two regions by forming raised form protecting film at the boundary between the wiring electrode forming region and non-wiring electrode forming region on a semiconductor substrate and evaporating an Al film over the entire surface thereafter removing the protecting films.
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Inventors:
KURODA SATORU
Application Number:
JP13895276A
Publication Date:
June 05, 1978
Filing Date:
November 17, 1976
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L29/78; H01L21/28; H01L21/306; H01L21/3205; (IPC1-7): H01L21/88; H01L29/78