To prevent the destruction caused by volume expansion when impregnating plural silicon carbide baked materials with molten silicon by finally cooling and solidifying a joined part by fitting when forming a gap, fitting and joining a recessed part on one side to a protruding part on the other side, impregnating the baked materials with the molten silicon, cooling and solidifying the molten silicon.

A joined body prepared by joining plural silicon carbide baked materials stood from a lower supporting plate 2 and having an upper supporting plate 3 placed thereon is impregnated with molten silicon, which is then solidified to produce a silicon-impregnated silicon carbide member 1. In at least one of joined parts 5 and 9 of the joined body, a recessed part of the upper supporting plate 3 is fitted onto a protruding part of the supporting member 4 fitted into the recessed part with a gap part formed therebetween. When impregnating the joined body with the molten silicon and cooling and solidifying the molten silicon, the cooling is carried out from the lower supporting plate 2 and the supporting member 4 to make the volume expansion of the supporting member 4 escape to the joined part 9 with the upper supporting plate 3 fitted with the gap formed therebetween. The joined part 9 is finally cooled and solidified to afford the member 1.