PURPOSE: To obtain an excellent target for the formation of an oxide thin film having a (Ba,Sr)Ti perovskite structure by oxidizing and reducing a Ba-Sr- Ti oxide powder and sintering the powder in a vacuum hot press.
CONSTITUTION: A Ba-Ti oxide powder and a Sr-Ti oxide powder or (Ba,Sr)Ti oxide powder, each prepared by a sol-gel processing and having 1-10μm average particle size, are used as the source material and oxidized in an oxidative atmosphere such as air at 700-1200°C to decrease the carbon content to ≤1000ppm and the oxygen content to the amt. corresponding to the stoichiometric value. Then the source material is reduced by heating at 450-1300°C in a hydrogen atmosphere to decrease the carbon content to ≤100ppm and the oxygen content to less than the stoichiometric value. Then the source material is hot-pressed in vacuum to obtain a sintered body having ≤30ppm carbon content. Thus, a sputtering target for the formation of a thin oxide thin film having a (Ba, Sr)Ti perovskite structure is produced as the sintered body above described. The obtd. target has excellent toughness and little carbon content.
WATANABE KAZUO
SHIONO ICHIRO
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