Title:
PRODUCTION OF STAMPER
Document Type and Number:
Japanese Patent JPH059775
Kind Code:
A
Abstract:
PURPOSE:To easily produce a stamper uniform in thickness. CONSTITUTION:(A) A photoresist layer 2 is formed on a substrate 1 made of nickel, a laser-beam exposure device is used to form a fine pattern 2', and (B) a master disk 3 having the fine pattern 2' is formed. (C) An insulating layer 4 is successively laminated on the pattern 2', and (D) a conductive film 5 of nickel is formed to make the master disk conductive. (E) A metallic nickel film 6 is then formed on the conductive film 5 by electrocasting. The nickel film 6 is ground to uniform thickness, the films 5 and 6 are integrated and released from the master disk 3, and a stamper 7 is formed.
Inventors:
SHIKAME OSAMU
KAI TAKASHI
YOSHINO HITOSHI
YUASA TOSHIYA
HAYASHI HISANORI
KAMITAKAHARA HIROFUMI
KUSHIDA NAOKI
KAI TAKASHI
YOSHINO HITOSHI
YUASA TOSHIYA
HAYASHI HISANORI
KAMITAKAHARA HIROFUMI
KUSHIDA NAOKI
Application Number:
JP15704091A
Publication Date:
January 19, 1993
Filing Date:
June 27, 1991
Export Citation:
Assignee:
CANON KK
International Classes:
B29C33/38; C25D1/00; G11B7/26; B29L17/00; (IPC1-7): B29C33/38; B29L17/00; C25D1/00; G11B7/26
Attorney, Agent or Firm:
Wakabayashi Tadashi
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