PURPOSE: To obtain a stamper superior in transferability, replica attainability, wear resistance, and corrosion resistance, by forming a conductive film with the first thin film layer provided with adhesive strength and corrosion resistance and the second thin film layer which is superior in matchability and has high corrosion resistance and wear resistance.
CONSTITUTION: A reactive film consisting of a photoresist or a low-melting point metal is stuck onto a glass substrate 21, and a laser exposure method is used to form a fine pattern layer 22 on this film, thus obtaining an original plate. Cr or Ti is vacuum-deposited as the first thin film layer 23 by sputter deposition, electron beam deposition, or the like. Au or Pt is deposited as the second thin film layer 24 similarly. An Ni layer 25 is formed on the conductive film consisting of these two layers by the electrodeposition. Next, the substrate 21 is removed for the purpose of removing the original plate, and a resist release liquid is used to remove the resist 22. As the result, An Ni stamper crowned with the conductive film of the Cr/Au, Ti/Au, Cr/Pt, or Ti/Pt double layers whose surface the fine pattern is transferred from the original plate to is attained.
HORI AKIO
YASUDA NOBUROU
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