Title:
PRODUCTION OF SUPERCONDUCTING THIN FILM
Document Type and Number:
Japanese Patent JPH01188421
Kind Code:
A
Abstract:
PURPOSE:To retard diffusion of elements other than oxygen and to cause diffusion of oxygen into an oxide more easily in the heat-treatment of a YBa2Cu3O7 type oxide formed on a substrate in O2 atmosphere by performing the heat- treatment at lower temp. in the atmosphere having elevated partial pressure of O2 and irradiating the oxide with ultraviolet rays. CONSTITUTION:Heat-treatment of a YBa2Cu3O7-delta(0<=delta<=1) type oxide formed by sputtering or ion beam sputtering on a substrate is performed in O2 atmosphere of >=1atm pressure at 100-400 deg.C substrate temp. while irradiating the oxide with ultraviolet rays having 160-200nm wavelength for 1-10hr. When light is used as the ultraviolet rays, excitation efficiency of the gaseous O2 is increased and necessary time for the heat-treatment is shortened preferably.
Inventors:
SOWA TAKAYOSHI
ISADA NAOYA
IWANAGA SHOICHI
ISADA NAOYA
IWANAGA SHOICHI
Application Number:
JP1250688A
Publication Date:
July 27, 1989
Filing Date:
January 25, 1988
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L39/24; C01G1/00; C01G3/00; C23C14/08; C23C14/34; C23C14/46; C30B29/22; H01B13/00; (IPC1-7): C01G3/00; C23C14/08; C23C14/34; C23C14/46; C30B29/22; H01B13/00; H01L39/24
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)