Title:
PRODUCTION OF SYNTHETIC SILICA GLASS POWDER
Document Type and Number:
Japanese Patent JPH06329406
Kind Code:
A
Abstract:
PURPOSE: To obtain silica glass powder suitable as a raw material for ultrahigh- purity silica glass products.
CONSTITUTION: The synthetic silica glass powder can be obtained by baking silica powder produced by hydrolyzing a tetraalkoxysilane in the presence of 1-10mol%, based on the tetraalkoxysilane, of fine silica powder 0.01-100μm in particle diameter.
Inventors:
UTSUNOMIYA AKIRA
KATSUKI TAKANOBU
SHIMOYAMA MASARU
KATSUKI TAKANOBU
SHIMOYAMA MASARU
Application Number:
JP12400393A
Publication Date:
November 29, 1994
Filing Date:
May 26, 1993
Export Citation:
Assignee:
MITSUBISHI CHEM IND
International Classes:
C01B33/18; C03C1/00; C03C3/06; (IPC1-7): C01B33/18; C03C1/00; C03C3/06
Attorney, Agent or Firm:
Hasegawa Moji
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