PURPOSE: To efficiently produce a clean target at a low cost by joining a metal member as a material to be sputtered and a metal member as a support part in one body and removing the surface of the former member so that a clean surface is exposed.
CONSTITUTION: A first metal member 1a as a material to be sputtered and a second metal member 1b of oxygen-free copper, etc., having high heat conductivity as a support part supporting the member 1a are placed opposite to each other while interposing a spacer having a high m.p. as required. Gunpowder 3 put on the member 1a with a buffer layer 2 in-between is exploded through an exploder 4 and the members 1a, 1b are joined in one body by explosive cladding to form a target 1. The layer 2 and the contaminated surface layer of the member 1a are then removed so that a clean surface is exposed. The member 1b is worked into a prescribed shape and the members 1a, 1b are washed to obtain a target 1 having the desired shape.
NOZAWA YOSHIHARU
TAKAHASHI KOICHIRO
SHINKU YAKIN KK