Title:
PRODUCTION OF THIN FILM FOR PELLICLE
Document Type and Number:
Japanese Patent JPH0241329
Kind Code:
A
Abstract:
PURPOSE:To produce a thin film for pellicle effective in preventing the adhesion of foreign material to a transparent substrate such as a reticle by applying a nitrocellulose solution to a continuous sheet substrate and removing the solvent from the coating layer. CONSTITUTION:A nitrocellulose solution is applied to a continuous sheet substrate having releasability to nitrocellulose and the solvent is removed to form a thin film of nitrocellulose on the surface of said continuous substrate. The formed thin film is peeled off from the substrate and wound.
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| JP2002265713 | POLYPROPYLENE BASED FILM FOR FUSION SEALING |
Inventors:
ASAI HISAO
MATSUI TAKEKI
WADA MASATAKA
AOKI KENJI
MATSUI TAKEKI
WADA MASATAKA
AOKI KENJI
Application Number:
JP19210288A
Publication Date:
February 09, 1990
Filing Date:
August 02, 1988
Export Citation:
Assignee:
ASAHI KASEI DENSHI KK
International Classes:
C08J5/18; C08L1/00; G03F1/62; (IPC1-7): C08J5/18; C08L1/00; G03F1/14
Domestic Patent References:
| JPS6035733A | 1985-02-23 | |||
| JPS6237113A | 1987-02-18 |
Attorney, Agent or Firm:
Hidetake Komatsu (2 outside)